Maintenance of the cryopumps & cryocoolers
Main maintenance work items
Replacing the various worn parts
Replacing the seal rings
Replacement the O rings
Replacing the bearings
Replacing the valves
Re-constituting the vacuum panel
Chemically washing the vacuum panel (treatment wash)
Re-installing activated charcoal
Surface treatment of the radiant shield by blackening
Vacuum baking
Main test items
Argon throughput test
Vacuum leakage test
Refrigerant helium leakage test
Heat load test
Temperature control performance test
Products handled
| Sumitomo Heavy Industries, Daikin Industries, APD, SCAI |
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Maintenance system
Equipment
Dedicated heat load tester for chillers
Argon throughput test equipment
Helium leakage detector
Maintenance of vacuum baking cryopumps
Motor torque measuring unit
Helium flowrate measuring unit
Cryopumps automatic tester
Locations
