Chemical Management System (CMS)
Construction Technology of Management Method and Chemical Refining Technology Based on the Chemical Characteristics.
Achieved Reduction in Amount of Usage and Waste of Chemicals, Energy Savings & Resource Savings
Achieved Reduction in Amount of Waste, Energy Savings & Resource Savings
In the semiconductor and LCD panel industries, NTE achieved stabilization of device manufacturing processes by adopting a chemical management system (CMS) for chemicals used in the manufacturing of devices by photo-lithography processes, as well as reductions in the amount of usage and waste of chemicals, energy savings and resource savings.
Product Lineup
| Ensures stable quality of the developer | DDS-21(S) Developer Dilution Supply System |
| Automatic control of 2 component concentrations of developer in real time | DDS-11 Developer Management System |
| Constant recycling and supply of component concentrations of a developer | DMS-II Developer Recycling System |
| Integrated developer dilution and developer component concentration control function | DDS-32S Developer Dilution and Management System |
| Further improved recycling efficiency of developer, allows for stable quality of recycled developers | DPF Developer Purification Filtration System |
| Extends life of the resist stripper (remover) stripping solutions, and reduces amount of usage and waste | RMS Remover Management System |
