DMS-II Developer Recycling System

Collectively recovers, recycles and supplies developer for numerous developer systems

The DMS-II is a system which collectively recovers the used developer waste from numerous developer systems. Based on the knowhow of the DDS-11, this system also recycles the alkali concentration which is a component of the developer and the resist concentration dissolved by the developing process to a constant level, and resupplies the developer to the developer system.

Features

Centralized control can be performed for numerous developer systems

Concentration control by a unique high precision conductivity meter and absorbance meter

Maintains constant developer quality (stabilization of device manufacturing process)

Reduces amount of developer consumption by 60% or more (actual value)

Reduces the amount of developer waste