DDS-11 Developer Management System

Automatic control of alkali concentration and resist concentration online

The DDS-11 is a system which is connected to the developing system 1 by 1, and performs real time measurement of the alkali concentration which is a component of the developer and the resist concentration dissolved by the developing process, and maintains the constant component concentration of a developer by automatic concentration control, to stabilize the device manufacturing process and greatly reduce the amount of usage and waste of developer.

Features

Concentration control by a unique high precision conductivity meter and absorbance meter (carbonate measurement is available as an option)

Maintains constant developer quality (stabilization of device manufacturing process)

Reduces amount of developer consumption by 60% or more (actual value)

Reduces the amount of developer waste

Compact design in consideration of cleanroom installation

Abundant variations according to the manufacturing process application