RMS Remover Management System
Extends the life of the resist stripper(remover) and reduces the amount of usage and waste
Automatic control of the main component concentration of the resist stripper online
The RMS is a system which maintains a constant component concentration of the resist stripper to stabilize the device manufacturing process, and by extending the life of the resist stripper, the frequency of replacing the solution can be reduced, which reduces the amount of usage and waste of the resist stripper.
Features
High precision concentration control by an absorbance meter
Uniform quality of the resist stripper(stabilization of device manufacturing process)
Reduces the amount of the resist stripper consumption
Reduces the amount of the resist stripper waste
Compact design in consideration of cleanroom installation
Abundant variations according to the components of the resist stripper
