DDS-32S Developer Dilution and Management System
Integrated developer dilution and developer component concentration control function
Compactly integrated the functions of DDS-21 and DDS-11
The DDS-32S is a system which is connected to the developing system 1 by 1, and performs simple dilution of undiluted developer solutions to supply diluted solutions to the developer system. Based on the knowhow of the DDS-11, this system also performs real time measurement of the concentration of the developer online, maintains the constant component concentration of a developer by automatic concentration control, to stabilize the device manufacturing process and greatly reduce the amount of usage and waste of developer.
Features
Ideal for pilot lines and small-lot production lines
Concentration control by a unique high precision conductivity meter and absorbance meter
Maintains constant developer quality (stabilization of device manufacturing process)
Reduces amount of developer consumption by 60% or more (actual value)
Reduces the amount of developer waste
