GRAIL 10-305-X-LV
Any temperature measurement(300K ～below 9K)
Specification(Mechanical Cryogenic prober station)
| Item | GRAIL 10-305-X-LV |
| Equipment configuration | Cryogenic prober main unit X 1set / Helium compressor unit X 1set Vacuum exhaust unit X 1set |
| Prove body outline dimensions | 960(W) X 720(D) X 1300(H)（Not include a protection bumper) |
| Weight | Prober main unit:500kg around / Helium compressor unit:92kg |
| Cooling method | Mechanical 2steps 4K Refrigerator / Model Number:SRDK305D |
| Measured temperature range | < 9K～300K |
| Area can be measured | < 20mm X 20mm |
| Cooling time until the minimum temperature | < 120minutes |
| Temperature Stability *1 | 9K～RT：±0.2ｋ |
| Measurement noise | <±50fA No probe arm : < ±1pA |
| Quantity of vibration sample stage | Our environmental measurements ±2μm |
| Probe head | 0~6 pieces *3 |
| Probe mobility | X-axis:50mmst Y/Z-axis:25mmst |
| Signal connector | TRIAX connectorX(quantity probe+1) *4 |
| Sample Stage mobility | No transferring machanism |
| Options that can be mounted etc... *2 | Magnet kit / High temperature kit / TRIAX holder kit |
*1)If the temperature sensor is used Si
*2)There is a casa where the basic specifications are subject to change
*3)I represents the number of portions of the "X"
*4)+1 is for the back gate
