GRAIL 10-308-X-4K-LV

Low vibration, Anytemperature measurment(300K~4k)

GRAIL 10-308-X-4K-LV

Specification(Mechanical Cryogenic prober station)

Item GRAIL 10-308-X-4K-LV
Equipment configuration Cryogenic prober main unit X 1set / Helium compressor unit X 1set
Vacuum exhaust unit X 1set
Prove body outline dimensions 960(W) X 720(D) X 1600(H)(Not include a protection bumper)
Weight Prober main unit:700kg around Chiller unit:220kg
Cooling method Mechanical GM-JT / 4K Refrigerator / Model Number:CG308
Measured temperature range < 4K~300K
Area can be measured < 15mm X 15mm
Cooling time until the minimum temperature < 300minutes
Temperature Stability *1 4K~RT:±0.2K
Measurement noise < ±50fA
Quantity of vibration sample stage < ±2μm
Probe head 2~6 pieces *3
Probe mobility X-axis:50mmst Y/Z-axis:25mmst
Signal connector TRIAX connectorX(quantity probe+1) *4
Sample Stage mobility No transferring machanism
Options that can be mounted etc... *2 Magnet kit / High temperature kit / TRIAX holder kit

*1)If the temperature sensor is used Si
*2)There is a casa where the basic specifications are subject to change
*3)I represents the number of portions of the "X"
*4)+1 is for the back gate