GRAIL 43-305-X-LV
Low-noise measurements 4"wafer
Specification(Mechanical Cryogenic prober station)
| Item | GRAIL 43-305-X-LV |
| Equipment configuration | Cryogenic prober main unit X 1set Helium compressor unit X 1set Vacuum exhaust unit X 1set |
| Prove body outline dimensions | 960(W) X 720(D) X 1300(H)（Not include a protection bumper) |
| Weight | Prober main unit:800kg around / Helium compressor unit:92kg |
| Cooling method | Mechanical 2steps 4K Refrigerator Model Number:SRDK305D |
| Measured temperature range | < 20K～300K |
| Area can be measured | < 70mm X 70mm |
| Cooling time until the minimum temperature | < 240minutes |
| Temperature Stability *1 | 20K～RT：±0.2ｋ |
| 測定ノイズ | ±50fA以下 |
| Measurement noise | Our environmental measurements: ±2μm |
| Probe head | 2~6 pieces *3 |
| Probe mobility | X-axis:50mmst Y/Z-axis:25mmst |
| Signal connector | TRIAX connectorX(quantity probe+1) *4 |
| Sample Stage mobility | X/Y-axis:±38mm Z-axis:6mm stroke |
| Options that can be mounted etc... *2 | Magnet kit / High temperature kit / TRIAX holder kit |
*1)If the temperature sensor is used Si
*2)There is a casa where the basic specifications are subject to change
*3)I represents the number of portions of the "X"
*4)+1 yyis for the back gate
